Two excellent papers on the topic:

"Etch Rates for Micromachining Processing" Kirt R. Williams, Richard S.
Muller, Journal of Microelectromechanical Systems, Vol 5 No 4 Dec 1996
pp 256-269

"Etch Rates for Micromachining Processing - Part II" Kirt R. Williams,
Kishan Gupta, Matthew Wasilik, Journal of Microelectromechanical
Systems, Vol 12 No 6 Dec 2003 pp 761-778

Loren

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
[email protected]
Sent: Friday, November 06, 2009 6:42 AM
To: [email protected]
Subject: [mems-talk] List of attacked/etched materials

Hi,

I am looking for papers/books/publications stating which metal is
etched/attacked/not attacked by the most common etchants (mainly HF,
HCl,
H2O2, citric acid, phosphoric acid). Furthermore I'd like to find also
information about attack of some common semiconductors and oxides (like
GaAs, Si, Al2O3, SiO2, HfO2).

I could only find books showing which etchant etches BEST which metal -
like
the book 'Advanced Inorganic Chemistry' of F. Cotton. But I need to know
if
there is non/some/a lot of attack of a material. E.g. is Nickel totally
stable in HCl, Cr in HF etc., or is there a considerable attack?

Thanks in advance
Daniel