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MEMSnet Home: MEMS-Talk: DRIE on borosilicate glass
DRIE on borosilicate glass
2009-11-12
Khaldoun Halalo
DRIE on borosilicate glass
Khaldoun Halalo
2009-11-12
Hi all,

Has anyone heard about a DRIE process to etch borosilicate?
Or is this really only feasible with Si and Quarz?


thnx
Khaldoun
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Gruß

Khaldoun Halalo
[email protected]
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