Thanks for the note Jin.  One question that keeps resurfacing for me is
whether you can get hemispherical lenses from resist reflow.  Most of the
literature seems to show lenses with a width of say 100um but only a height
of a couple microns.  Is the pr reflow a reasonable means of achieving a
hemispherical lens with a width of say 25 um and a height of 12-20um?

-----Original Message-----
From: Jin Yu [mailto:[email protected]]
Sent: Wednesday, November 11, 2009 11:24 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Microlens fabrication


Using AZ 40XT-11D resist can do this job. It's a useful resist and can
be reflowed at about 130C.

Cheers,

Jin Yu
Optical Imaging and Display Systems
Sharp Laboratories of Europe Ltd.
Edmund Halley Road, Oxford Science Park,
Oxford, OX4 4GB, United Kingdom.
Tel:  +44(0)1865 747711
Fax: +44(0)1865 747719
Email: [email protected]
www.sle.sharp.co.uk