We would like to invite MEMS researchers to try the

        SEGS: On-line Etch Simulator


SEGS was developed jointly by Prof. Erik Antonsson's group at Caltech
and Prof. Ted Hubbard's group at DalTech (Dalhousie University).
This simulator is open any MEMS researcher and has been used
by over 100 users worldwide.



 WHAT DOES THE SOFTWARE DO?

      The software simulates the etching of (100) silicon wafers.
      It allows the user to interactively draw masks through Netscape,
      and then specify etchants and simulation parameters.
      The simulation results are displayed as an animation.

      The variation software allows the user to change parameters of the etch
      and analyse the effect of different types of variations.


 REQUIREMENTS:

      Some basic knowledge of isotropic/anisotropic etching
      Java Enabled Netscape


 LOCATION:


        http://mira.me.tuns.ca/segs/Welcome.html


        or to view some etch animations try:

        http://micron.me.tuns.ca/Research/Animations/gallery.html


--

Dr. Ted Hubbard
Department of Mechanical Engineering
DalTech - Dalhousie University
email: [email protected]
http://micron.me.tuns.ca/

Dr. Erik Antonsson
California Institute of Technology
http://design.caltech.edu/Research/MEMS/