Tungsten is not difficult to sputter at all. Usually though, what is
sputtered is Ti/W with Ti being 10%, though whether by weight or atom percentage
I don't remember.

Ed

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Jauniskis, Linas
Sent: Monday, November 16, 2009 7:59 AM
To: [email protected]
Subject: [mems-talk] Tungsten deposition, e-beam, sputter


Hi,

While I see e-beam as a recommended technique for depositing tungsten thin
film, I have not been able to find a reference for what type of crucible to
use. Could someone suggest crucible type? Any other particulars about e-beam
of tungsten one should be aware of?

Am also considering sputtering. Is tungsten particularly difficult to
sputter, as compared to say titanium?

Thank you,
Linas.