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MEMSnet Home: MEMS-Talk: Corona Discharge
Corona Discharge
1998-10-23
Tze-Jung Yao
Corona Discharge
Tze-Jung Yao
1998-10-23
Hi,
  We are looking for corona discharging machine which can implant electron
into wafer. Is there anyone know where  I can buy this machine? Thank you
for your help.

Yao, Tze-Jung


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