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MEMSnet Home: MEMS-Talk: (111) mirror surfaces
(111) mirror surfaces
2009-12-05
Andrea Mazzolari
(111) mirror surfaces
Andrea Mazzolari
2009-12-05
Hi all,

i need to realize grooves in (100) silicon. I will etch the silicon
disclosing the (111) planes. I need that the (111) surfaces are mirror
like.

Which are the best etchant and surfactant in ordert to obtain this result ?

Thanks,
Andrea

reply
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