Ghauri,

       The best way I know to quantify anti stiction coating is by using
water contact angle with the surface.  For example the water contact
angle with Teflon is 120 degrees.  Teflon has 13 Fluorine atoms sticking
out which are pretty slick.  There are other chemicals you can put down
using CVD approaches.  For example a hepta deca fluoro silane has 17
Fluorine atoms sticking out and can achieve 130 degrees contact angle.
With other approaches for example an intermediate layer that promotes
high contact angle then a hepta deca layer figures close to 175 degrees
can be achieved.  To calibrate you, 0 is impossible this means water
spreads out one molecule deep.  180 degrees is impossible this means the
water does not touch the surface and you have an anti- gravity machine.
Contact me directly for lots more information at
[email protected].  Bill Moffat

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Imran Ghauri
Sent: Friday, December 04, 2009 4:50 PM
To: General MEMS discussion
Subject: [mems-talk] Question about anti-friction coatings

Hi All,

I am looking into anit-friction coatings, wear resistant coatings and
corrosion resistant coatings. The primary purpose is anti-friction. Does
anyone know if there are materials out which provide no or very less
friction. I am mainly interested in thin film coatings by reactive
sputtering process eg. Oxides, oxynitirde or nitirdes. Any help will be
really appreciated.

Thanks and best regards,

Ghauri