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MEMSnet Home: MEMS-Talk: wet chrome etching without undercutting
wet chrome etching without undercutting
2009-12-14
jefpk@talk21.com
wet chrome etching without undercutting
jefpk@talk21.com
2009-12-14
Hi,

We are looking at transferring a pattern using standard photoresist such as
shipley into an underlying (50nm) Cr layer. Does anybody know any tricks for wet
chrome etching, which will prevent the strong undercutting? What else does
anyone recommend looking at to limit this undercutting?

Best wishes, Paul



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