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MEMSnet Home: MEMS-Talk: Mounting of piezo disks and attaching thin pipes
Mounting of piezo disks and attaching thin pipes
1998-10-28
Andrezej Prochaska
Mounting of piezo disks and attaching thin pipes
Andrezej Prochaska
1998-10-28
Dear Researchers,

I'm gonna try to surface mount 3 and 5mm diameter piezoelectric disks on very
thin (several tens of microns) silicon membranes by use of conductive epoxy
glue (low thickness and good uniformity of the glue layer are crucial),
as well as attach thin flexible pipes (internal diameter < 1.2mm) to silicon
wafer under right angle, in order to provide connection between external liquid
reservoir and a channel etched in the silicon.

Can anybody give me advice or literature references on these topics as well as
info on suppliers of very thin pipes (hypodermic needles).

Has anybody tried to attach a thin pipe to the edge of the bonded dies (to the
cross section of the channel etched in the plane of the wafer)?

Any information will be very appreciated.

Andrzej Prochaska


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