Andy,
If you have access to any simple lapping equipment, you should be able to get a
roughened surface in a minute or less. The wafer can be mounted onto a
substrate, such as a glass disk, using a wax or other temporary adhesive. Mix a
slurry out of Al2O3 grit, maybe about 3µm, with a 1:3 to 1:5 ratio ( v/v
grit:water) and put it into a squeeze bottle. It won't dissolve, but keep it
suspended by shaking it. Put some grit onto a flat glass plate and lap the
wafer using a figure eight motion for about a minute, you should be fine.
Often, wafers are thinned after processing using a similar process. I once had
a process where I had to thin my GaAs wafer and then repolish it. Your task is
simple by comparison!
Brad Cantos
[email protected]
http://holage.com
On Jan 20, 2010, at 1:38 AM, Andy Irvine wrote:
> Hi all.
>
> Apologies for joining in order to ask a question - very bad form. I promise
to answer at least one myself! Anyway...
>
> Any good tips for roughening a GaAs surface?
>
> I'm working with a GaAs(-based) wafer with (curses!) a polished back face, and
am trying to avoid the possibility of multiple optical reflections between the
two faces of the wafer. I therefore need my back surface to be rough (in fact,
just like any old one-side-polished substrate!). I'd guess that it's going to
involve mechanical abrasion followed by a preferential etch, but if anyone can
be more specific and save me time (and ideally give me a good chemical-only HF-
free method, please Santa), that'd be extremely helpful.
>
> I've blackened many a surface in my time, but it's remarkably hard to do it
when you actually want to... ;-)
>
> Cheers,
>
> Andy