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MEMSnet Home: MEMS-Talk: XeF2 gas etch plexiglass?
XeF2 gas etch plexiglass?
2010-01-26
Jiho Song
2010-01-26
Kyle Lebouitz
2010-01-26
shay kaplan
XeF2 gas etch plexiglass?
Kyle Lebouitz
2010-01-26
Hi Jiho,

Xenon Difluoride does not etch plexiglass.

Kyle

 >>  Hello all,

 >>  Do you guys know Xenon Difluoride etches the plexiglass?

 >>  I am planning to bond the molded Si chip with polymer onto the
 >>  plexiglass and put it into the chamber.

 >>  Please let me know if you any ideas.

 >>  Thank you.

reply
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