It does not but the reaction is exothermic - if you etch a lot of silicon
fast the heat might distort the plastic

Shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Jiho Song
Sent: Tuesday, January 26, 2010 2:54 AM
To: General MEMS discussion
Subject: [mems-talk] XeF2 gas etch plexiglass?

Hello all,

Do you guys know Xenon Difluoride etches the plexiglass?

I am planning to bond the molded Si chip with polymer onto the
plexiglass and put it into the chamber.

Please let me know if you any ideas.

Thank you.