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MEMSnet Home: MEMS-Talk: Stripping SU-8
Stripping SU-8
2010-02-01
Paul Nguyen
2010-02-01
David Pierce
2010-02-01
mikas remeika
2010-02-02
Maria Matschuk
2010-02-02
Robert Black
2010-02-02
Paul Nguyen
Stripping SU-8
David Pierce
2010-02-01
Paul,

I use an oxygen plasma to strip SU-8 and it seems to work well.

David


On Feb 1, 2010, at 10:04 AM, Paul Nguyen wrote:

> Hi all,
>
> Regarding Su-8 resist, does anyone have experience on how hard to strip this
> resist?  My colleagues have mentioned to me that they have had a hard time
> stripping it.
>
> Thanks,
> Paul
reply
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