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MEMSnet Home: MEMS-Talk: Lithography for the copolymer F8BT
Lithography for the copolymer F8BT
2010-02-03
Titia A
Lithography for the copolymer F8BT
Titia A
2010-02-03
Hi all,

I have to used the copolymer F8BT to create devices and
I need some informations about it to make a lithography. Does anyone
know what photoresist I can used with this copolymer and the best way
to etch it.

Thanks
Tassadit
reply
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