Could you have another dielectric layer above the PMMA. Is there any reason you
are using PMMA?

-----Original Message-----
From: Emanuele Orabona [mailto:[email protected]]
Sent: Saturday, 6 March 2010 8:20 AM
To: General MEMS discussion
Subject: [mems-talk] PMMA as gate insulator

Dear all,

I tried to realize an OTFT using PMMA as gate insulator and PEDOT/PSS
as electrodes. In the top gate structure the PEDOT/PSS penetrated in
the PMMA layer creating short circuit with source and drain. I think
that PMMA layer is porous. I've also tried to change solvents,
temperatures, deposition conditions, deposition techniques.

How can i solve this problem?

Thank you
Emanuele