Dear colleagues,

I am looking for an equipment for precise nondestructive thickness
measurement of Si membranes with thicknesses from 1um up to about 20 um. The
membrane size is larger than 200um. The equipment should allow measurements
on 6" (and 5") wafers, has a x-y-table for measurements over the wafer and a
spot size smaller than 200um. I would prefer to measure the real thickness
of the membrane and not to use a profilometer or change of microscope's
focus to calculate the membrane thickness from the wafer thickness.
Information about IR spectrometer with a spot size smaller than 200um or
another type of measuring system is deeply appreciated.

Dr. Roumiana Paneva

        X-FAB GmbH
        Haarbergstasse 61
        D-99097 Erfurt
        Deutschland
        Tel: (+49) 361 42 053 21
        FAX: (+49) 361 42 053 11