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MEMSnet Home: MEMS-Talk: Re: Liftoff Resist Safety
Re: Liftoff Resist Safety
1995-10-31
cjkim@seas.ucla.edu
1995-11-08
Gert Friis Eriksen
Re: Liftoff Resist Safety
cjkim@seas.ucla.edu
1995-10-31
Bromobenzene can be used for top-surface treatment of PR for lift-off process,
too. However, I don't know if it is any safer than chlorobenzene. I hope
someone can comment on the toxicity of bromobenzene......

Prof. CJ Kim
Micro-Manufacturing Laboratory
Mechanical, Aerospce, and Nuclear Engineering Department
University of California, Los Angeles


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