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MEMSnet Home: MEMS-Talk: Lab for PECVD deposition
Lab for PECVD deposition
1998-11-16
Michael Gaitan
Lab for PECVD deposition
Michael Gaitan
1998-11-16
Hello:

I am looking for a lab that can deposit low temperature PECVD nitride
on single chips mounted on wafers.  Any recommendations would be
greatly appreciated.

Regards,

Michael Gaitan

---------

Michael Gaitan, Ph.D.
Project Leader
MicroElectroMechanical Systems
NIST
Gaithersburg MD 20899


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