John,

The BCl3 I understand the SF6 not so much. The BCl3 is a toxic and corrosive
gas with a low vapor pressure. To facilitate BCl3 you will need a gas
cabinet with gas detection, sub-atmospheric regulator, temperature
controlled gas lines and or the delivery system installed very close to the
tool (i.e. in the clean room.)

Good luck with facilities and safety.

Regards,
Glenn


-----Original Message-----
From: John Montoya [mailto:[email protected]]
Sent: Tuesday, July 06, 2010 6:38 PM
To: [email protected]
Subject: [mems-talk] SF6 / BCl3 issue


Hello everyone.

I am trying to perform a selective GaAs / AlGaAs etch.  I
recently put in a request to my cleanroom manager to
incorporate SF6 and BCl3 onto our PlasmaTherm SLR750
series ICP/RIE machine.  For some unexplained reason, I
was denied from putting SF6 and BCl3 onto our machine.
 Does anyone know of any safety or contamination issues
associated with these two gases?  Please help.

Sincerely,
John