hello,

We have been trying to pattern SiN deposited on textured Si using
lithography, but we are unable to obtain desire pattern, as the entire SiN
gets etched in BHF, the height of the textured surfaces are about 8-10 um.
Do we need to spin coat a thick layer so that the textured surface is
covered, or there is there something else?

Do let us know.

vikrant