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MEMSnet Home: MEMS-Talk: Temporary adhesive for spin coating
Temporary adhesive for spin coating
2010-08-26
Gareth Jenkins
2010-08-26
Alex Mellnik
2010-08-27
Gareth Jenkins
2010-08-30
James Paul Grant
2010-08-31
Gareth Jenkins
2010-08-31
James Paul Grant
2010-08-31
Wilson, Thomas
2010-09-03
Gareth Jenkins
Temporary adhesive for spin coating
Gareth Jenkins
2010-08-26
Hi

I need to temporarily mount a small die onto a 4 inch wafer so I can spin a
layer of resist (SU-8).

I don't want to use any tape as being small and fragile, they may be
difficult to remove.

Someone has mentioned a high melting temperature wax type adhesive for doing
this kind of job. Can anyone recommend a suitable product?
Would standard paraffin wax work? Ideally I would leave the die mounted on
the wafer to do the baking/lithography. Would it be a big problem if this
melts during the baking?

Best regards

Gareth
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