Thank you for your suggestions.  Where can I purchase black wax? Can you
suggest any companies that sell the product?

Best Regards,

Temmuz CEYHAN
[email protected]

>
> Hello
>
> To use
> KOH  silicon etch  ; You can protect the back side of the
> wafer by the LPCVD nitride who is better than PECVD .and then use these
> three methods :
>
> 1.
> Protective Tapes
>
> 2.
> Wafer Holder
>
> 3.
> Black Wax
>
> The best
> option for frontside protection is  a coat of Black Wax to prevent
>  from broken   and contamination wafer ,after etching silicon
> with KOH you can remove the wax with Toluène solution very easy .
>
> Naitbouda
> abdelyamine
>
> [email protected]
> Process Engineer in the Dry etch area
> of the Clean Room of the CDTA
> Centre de Developpement des Technologies Avancées
> Cite du 20 Aout 1956 Baba Hassen,Alger,Algerie


Temmuz CEYHAN
M.Sc. Student
-----------------------------------------------
Dept. of Electrical and Electronics Engineering
+90(312)-290-1247
Advanced Research Labs / National Nanotechnology Research Center
+90(312)-290-3525
BILKENT UNIVERSITY
06800
ANKARA/TURKEY