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MEMSnet Home: MEMS-Talk: Selective Poly etch for P+
Selective Poly etch for P+
2010-09-21
morad massalha
2010-09-21
Morrison, Richard H., Jr.
2010-09-21
morad massalha
2010-09-21
Morrison, Richard H., Jr.
Selective Poly etch for P+
morad massalha
2010-09-21
Hello,

I'm using HNO, 1:3:8 volume, while HF is 49%, Nitric 70% acetic 99.7%. I'm doing
this etch in a lab, not in machine. I'm just doing feasibility. To found the
etch
rate ratio.



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