Temuz,

      It is best to use an LPCVD Stoichiometric Nitride instead of PECVD
(may be too high process temp for you), then 1500Å will do just fine.  To
stick wafer to glass try Apiezon Wax, or one of the crystalline waxes
(Bis-Stearamide).  Also Check on magic spin on Film from Brewer Science in
Rolla Missouri, USA.

Best Regards,

Wendell McCulley


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
Huy
Sent: Tuesday, August 24, 2010 11:54 AM
To: [email protected]
Subject: [mems-talk] KOH resistant paste

If you incorporate one or both of the following tricks, you will definately
improve the outcome: get a thicker thermal SiO2 underneath the nitride
and/or adding a layer of Cr/Au ontop of the nitride.

hv