Does anyone know the latest, or the most production compatible KOH mask for
protecting the metallized front side of the wafer ? Our last process step
requires back etch of the SOI handle wafer down to BOX layer to form thin
membranes and we need a front side protection coating other than the commonly
used nitride, oxide and metal masks. Clean removal in batch processing of this
mask after KOH etch is also critical.

Thanks,

Kris K. Vossough, Ph.D.
Principal
Nano and Micro Technology Consultants
E-mail: [email protected]
Voice: (408)373-5413
Fax: (650)798-5001
http://www.memswork.net