ultra sonic drilling can be use to drill 1mm hole on wafers

On Sun, Dec 5, 2010 at 12:39 PM, Petru Lunca Popa  wrote:

> Hi,
>
> I have just an ordinary Si/SiO2 commercial wafer and I want to to
> put a hole in it . The shape is not so important. Area should be around one
> mm squared or less.
>
> Any ideea how to do this without breaking the wafer?
> Mechanical or chemical methods?
>
> Thank you
> Petru

--
Lin, Xiaohui
Ph.D. Program in Electrical and Computer Engineering
Nanophotonics and Optical Interconnects Group
Microelectronics Research Center
The University of Texas at Austin
E-mail: [email protected]
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