Hi Petru,

You can use laserdrilling or powderblasting.

Regards,

Peter Kuijpers
MiPlaza Technology Laboratories
Philips Research Europe
High Tech Campus 04
Postbox HTC-4-1
5656 AE Eindhoven
The Netherlands
Tel.: +31 402743667
         +31 612507027
Email: [email protected]

-----Original Message-----
From: [email protected] [mailto:mems-
[email protected]] On Behalf Of Petru Lunca
Popa
Sent: Sunday 5 December 2010 19:39
To: General MEMS discussion
Subject: [mems-talk] how to drill a hole in a silicon wafer

Hi,

I have just an ordinary Si/SiO2 commercial wafer and I want to to
put a hole in it . The shape is not so important. Area should be around one
mm squared or less.

Any ideea how to do this without breaking the wafer?
Mechanical or chemical methods?

Thank you
Petru