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MEMSnet Home: MEMS-Talk: RE: MEMS Metrology Collaboration Opportunity
RE: MEMS Metrology Collaboration Opportunity
1998-12-02
Fred K. Forster
RE: MEMS Metrology Collaboration Opportunity
Fred K. Forster
1998-12-02
I am traveling now and cannot access the web to see what you have.  We are
developing membrane/piezoelectric micropumps and would like to know more
about the membrane deflections to optimize the design.  Can you calculate
local deflections over the membrane area on the fluid side of the membrane?
The pumps work in the kHz range.  Currently we use a laser vibrometer and
can only access the outside of the membrane on which side the piezoelectric
element is attached.  This work is currently funded by DARPA.

> -----Original Message-----
> From: Adolfo Gutierrez [mailto:[email protected]]
> Sent: Wednesday, November 18, 1998 1:40 PM
> To: [email protected]
> Subject: MEMS Metrology Collaboration Opportunity
>
>
> Dear Colleagues,
>
> We are looking for researchers interested in establishing joint
> collaborations to perform characterization of MEMS devices using
> our system
> MEMSPEC -2000.  W ecan perform measurements with vertical resolutions
> better than 0.1 um, lateral better than 1.0 um and motion analysis up to
> 100 kHz.  Please visit our web site at http://www.intersci.com/memspec
>
> The goal of the collaboration is to perform measurements of prototype
> devices leading to publications or proposal submissions. Refer your
> questions to my attention at the adress below.
>
> Adolfo
>
>
>
> + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + +
> + + + + +
>    +    Adolfo Gutierrez           (518) 283 7500
>    +    Senior Scientist           (518) 283 7502 fax
>    +    Director - Business Development
>    +    InterScience, Inc          e-mail1: [email protected]
>    +    105 Jordan Rd.             e-mail2: [email protected]
>    +    Troy, NY 12180                   http://www.intersci.com
>    +
>    +    USA Dometic Beeper & Voice Mail:      (800) 759 8888 PIN 2127477
>    +    International Beeper & Voice Mail:    (601) 960 9548 PIN 2127477
> + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + + +
> + + + + +
>
>
>
>


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