Have you tried a thin telfon layer, or perhaps poorly adhesive metal ?

-----Original Message-----
From: [email protected] [mailto:[email protected]]
Sent: Mon 13/12/2010 17:21
To: General MEMS discussion
Subject: Re: [mems-talk] PDMS fine structures

Hi,

You may want to silanize the master each time before pouring PDMS.
Good luck.

Seyed