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MEMSnet Home: MEMS-Talk: Cr/Au evaporation on diamond
Cr/Au evaporation on diamond
2011-01-05
Andrea Mazzolari
2011-01-05
Ned Flanders
2011-01-05
Shay
2011-01-05
Cao, Zongliang
Cr/Au evaporation on diamond
Cao, Zongliang
2011-01-05
Hi, Andrea

Both Ti and Cr work fine.
But based on my experience, Ti's adhesion to microcrystalline diamond is
better than Cr.

When I used Cr/Au as metal pads on my microcrystalline diamond sample, the
pads came off while I was doing wire bonding. However, Ti/Au turned out to
be totally fine.

I am not sure about other types of diamond.

On Wed, Jan 5, 2011 at 3:45 PM, Shay  wrote:

> Andrea,
>
> Either Cr or Ti should work
>
> Shay

--
Zongliang Cao
Best Regards


Micro and Nano Technology Lab
Electrical and Computer Engineering
Michigan State University
East Lansing, MI 48824, USA
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