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MEMSnet Home: MEMS-Talk: Resist sticking on Gold
Resist sticking on Gold
2011-01-20
Steckenborn, Arno
2011-01-21
Edouard Duriau
2011-01-23
Michael D Martin
Resist sticking on Gold
Michael D Martin
2011-01-23
Try AP-140 gold adhesion promoter from Silicon Resource, Inc..  Regular
adhesion promoter such as HMDS will not work well because the silane
chemistry prefers metal oxides or materials that will readily form an
oxide.  I believe that the AP-140 takes advantage of thiol (sulfur)
chemistry.

Good luck,

  Michael

>>> "Steckenborn, Arno"  1/20/2011 7:56
AM >>>
Hello,

Has anyone experience in improved adhesion of photoresist on
Gold-surfaces for plating of Gold ? After change of resist we experience
poor adhesion and undergrowth followed by delamination and flaking.

Thanks in advance
Arno
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