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MEMSnet Home: MEMS-Talk: RF-DC sputtering _ need some suggestion(s)
RF-DC sputtering _ need some suggestion(s)
2011-01-26
Yassine AEA
2011-01-26
Ruiz, Marcos Daniel (SENCOE)
2011-01-26
Yassine AEA
2011-01-26
Ruiz, Marcos Daniel (SENCOE)
2011-01-27
Brian Stahl
2011-01-28
Yassine AEA
2011-01-28
Ruiz, Marcos Daniel (SENCOE)
2011-01-26
Gary Hillman
2011-01-26
Shay
2011-01-26
Wilson, Thomas
2011-01-28
Yassine AEA
2011-01-28
Kagan Topalli
2011-01-28
Yassine AEA
2011-01-31
Yassine AEA
RF-DC sputtering _ need some suggestion(s)
Yassine AEA
2011-01-28
Hi Shay,

Thanks a lot for the suggestions.

Make sure to pump the system to e-7 before introducing the ar-------- after
baking for like  2hrs and use a almost a new rough pump the system goes to
4e-7, I never reach e-7.

Also, try to sputter cr onto a shutter befor coating your sample--------
this is a good point, I will try it.

Thanks again, and have a wonderful weekend,

Yassine, Ait El Aoud



On Wed, Jan 26, 2011 at 3:02 PM, Shay  wrote:

> Yassine,
>
> Make sure to pump the system to e-7 before introducing the ar. Also, try to
> sputter cr onto a shutter befor coating your sample.
>
> Shay
reply
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