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MEMSnet Home: MEMS-Talk: Protek adhesion problem
Protek adhesion problem
2011-02-07
Temmuz
2011-02-07
Warren Dustin
2011-02-08
Bill Moffat
Protek adhesion problem
Bill Moffat
2011-02-08
I would discuss with Brewer Science.  There are numerous organosilanes
specially designed for different types of organic adhesion.  Call Gelest
and get their free catalogue which lists hundreds of applicable
chemicals.  If you need any help in getting the right material down in
the best possible way contact me.  Bill Moffat

-----Original Message-----
From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org
[mailto:mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On
Behalf Of Warren Dustin
Sent: Monday, February 07, 2011 9:44 AM
To: General MEMS discussion; tceyhan@ee.bilkent.edu.tr
Subject: Re: [mems-talk] Protek adhesion problem

Hello Temmuz.

Usually an organosilane of some sort will help with the adhesion.  You
can try a dehydration bake followed by application of HMDS.  When I used
Protek I used an adhesion promoter with good results from HD
Microsystems.

Good luck.

Best Regards,

Dustin Warren, PE

EV Group
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