Dear all,

Is it possible to make ~100 nm pattern on organic substrate by
top-down route?

Can we draw pattern on organic substrate by EBL? (Cr layer was deposited
before spin coating electron resist to make sure the conductivity of
substrate. )
If it can work, can we transfer the EBL pattern to organic substrate by RIE?

Do you have the experience or good suggestion?

Thanks a lot!

Meng Gang