Hi Meng,

It depends on the material which you process for making your 100 nm
patterns. People before have attempted making polysilicon nanowires using
traditional microfabrication processes. Can you provide more information
about your pattern?

- Prasanna

On Wed, Feb 9, 2011 at 1:31 PM, Meng Gang  wrote:

> Dear all,
>
> Is it possible to make ~100 nm pattern on organic substrate by
> top-down route?
>
> Can we draw pattern on organic substrate by EBL? (Cr layer was deposited
> before spin coating electron resist to make sure the conductivity of
> substrate. )
> If it can work, can we transfer the EBL pattern to organic substrate by
> RIE?
>
> Do you have the experience or good suggestion?
>
> Thanks a lot!
>
> Meng Gang