Depending on the process conditions and thickness of aluminum you're using
(thinner is better), temperature can be a problem.  SU-8 will start to burn
above 200C.

Dan Ruiz

________________________________

From: mems-talk-bounces+dan.ruiz=honeywell.com@memsnet.org on behalf of Sheng
Zhang
Sent: Fri 2/11/11 8:01 AM
To: General MEMS discussion
Subject: [mems-talk] metal deposition on SU-8



Hi, All

I need to deposit (e-beam evaporation) Aluminum on SU-8 2002 (developed),
and there are subsequent patterning steps for aluminum. Is there anything I
need to watch out? Is there any tricks to improve adhesion? Any advice would
be greatly appreciated!

Thanks!
Sheng