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MEMSnet Home: MEMS-Talk: Thermal Oxide Si Wafers
Thermal Oxide Si Wafers
2011-02-14
Babis
2011-02-14
Edouard Duriau
2011-02-14
Denis Petrov
2011-02-14
Denis Petrov
Thermal Oxide Si Wafers
Babis
2011-02-14
Hey, All

I have recently purchased Thermal Oxide Si (Highly doped) wafers in order to
prepare Organic TFT samples. However the wafers are double side deposited with
SiO2. In order to make contact on the un-polished side, I suppose I have to etch
SiO2. What methods do you propose for that purpose. Is there anything to watch
out in order to achieve better results?

Thank you in advance!
reply
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