A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Image Reversal resist
Image Reversal resist
2011-02-23
Xiaohui Lin
2011-02-23
Bill Moffat
2011-02-23
Wilson, Thomas
2011-02-24
Warren Dustin
2011-02-24
[email protected]
2011-02-24
Bill Moffat
Image Reversal resist
Xiaohui Lin
2011-02-23
We are currently looking for a kind of resist that can form 6-8um THICK
NEGATIVE angle on substrate.

AZ9260 is able to provide thick resist but the developed shape is of
positive angle.

AZ5214 if using image reversal, is able to provide negative angle but its
thickness is always less than 2um.

I am just wondering if AZ9260 able to process with image reversal process?

Any other choice?

reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMStaff Inc.
University Wafer
Process Variations in Microsystems Manufacturing
Tanner EDA by Mentor Graphics