Maybe you can choose SU-8 2005?

I think that if you choose any negative resist, you can perform negative angle.


------Original Message------
From: Xiaohui Lin 
To: General MEMS discussion 
ReplyTo: Xiaohui Lin 
[mems-talk] Image Reversal resist
Feb 23, 2011 15:51

We are currently looking for a kind of resist that can form 6-8um THICK
NEGATIVE angle on substrate.

AZ9260 is able to provide thick resist but the developed shape is of
positive angle.

AZ5214 if using image reversal, is able to provide negative angle but its
thickness is always less than 2um.

I am just wondering if AZ9260 able to process with image reversal process?

Any other choice?