Hello.  You can also get good results using a negative resist such as AZ
NLOF at the thickness you require.  I had very good luck with this
resist in the past. Both MicroChem and Brewer Science also offer
bi-layer resists that can effect a good lift-off profile.

Best Regards,

Dustin Warren, PE

EV Group
invent * innovate * implement
Strategic Account Manager North America - Direct: +1 (480) 305 2447,
Main: +1 (480) 305 2400 Fax: +1 (480) 305 2401
Cell: +1 (480) 274 3894
E-Mail: [email protected], Web: www.EVGroup.com


-----Original Message-----
From: Xiaohui Lin [mailto:[email protected]]
Sent: Wednesday, February 23, 2011 2:52 PM
To: General MEMS discussion
Subject: [mems-talk] Image Reversal resist

We are currently looking for a kind of resist that can form 6-8um THICK
NEGATIVE angle on substrate.

AZ9260 is able to provide thick resist but the developed shape is of
positive angle.

AZ5214 if using image reversal, is able to provide negative angle but
its
thickness is always less than 2um.

I am just wondering if AZ9260 able to process with image reversal
process?

Any other choice?