A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: photolithography resolution (su-8 series)
photolithography resolution (su-8 series)
2011-02-28
[email protected]
2011-02-28
Michael Cooke
2011-02-28
Bill Moffat
photolithography resolution (su-8 series)
[email protected]
2011-02-28
Dear everyone,

I am using photoliyhography technique to make a 10um width pattern. I am not
sure i can get it.

Does anybody know the resolution of photolithography?

Thanks in advance
Regards
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Process Variations in Microsystems Manufacturing
Nano-Master, Inc.
MEMS Technology Review
Mentor Graphics Corporation