You should be able to easily get better than 5 microns

Dr Michael Cooke

R&D Scientist

PETEC

The Centre for Process Innovation (CPI)
Thomas Wright Way, NETPark,
Sedgefield, Co Durham,
United Kingdom, TS21 3FG

T: +44 (0)1740 625 617

 E: [email protected]
W: www.uk-cpi.com/PETEC


-----Original Message-----
From: 첸로 [mailto:[email protected]]
Sent: 28 February 2011 03:39
To: mems-talk
Subject: [mems-talk] photolithography resolution (su-8 series)

Dear everyone,

I am using photoliyhography technique to make a 10um width pattern. I am not
sure i can get it.

Does anybody know the resolution of photolithography?

Thanks in advance
Regards