A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Spin coating epoxy
Spin coating epoxy
2011-03-09
Amos Hercowitz
2011-03-10
Tsoll Doiiu
2011-03-10
Gareth Jenkins
Spin coating epoxy
Amos Hercowitz
2011-03-09
I would like to spin coat an epoxy material that was originally designed to
be used by screen printing.

For this, I've tried to dilute the epoxy with a solvent until it is thin
enough but when spinning I could not get rid of the comets/flare defects. it
seems that there are many micro bubblers inside the material which "pop"
when wafer is spinned and they are the ones causing the comets. what is the
best way to take out the bubbles out of the material? Pot life of the epoxy
is 3 days.

thanks
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
Addison Engineering
MEMS Technology Review
MEMStaff Inc.