A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Pyrex and Borofloat glass wafer clean
Pyrex and Borofloat glass wafer clean
2011-03-14
Kabla Meni
2011-03-14
Shay
2011-03-14
Alexander Slesarev
Pyrex and Borofloat glass wafer clean
Alexander Slesarev
2011-03-14
Cleaning with Piranha solution is very similar to first RCA step -
organics clean.

You should not apply second step of RCA as HF will damage glass.
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
MEMS Technology Review
Tanner EDA by Mentor Graphics
The Branford Group