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MEMSnet Home: MEMS-Talk: Finding [110] direction on (100) SOI wafer
Finding [110] direction on (100) SOI wafer
2011-03-14
Qi Luo
2011-03-15
Andrea Mazzolari
2011-03-15
Steckenborn, Arno
Finding [110] direction on (100) SOI wafer
Qi Luo
2011-03-14
Greetings everyone,

I would like to find out the exact [110] crystal direction of a (100) SOI wafer
before my first mask. The top Si (100) is about 200um thick. Wafer will come
with flat supposedly aligned to [110] direction, yet may have anyway from 0 to 3
degree alignment variation to [110]. Your suggestions would be greatly
appreciated.

Best regards,

--- Qi Luo




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