A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: PDMS mold peeling off process
PDMS mold peeling off process
2011-03-17
첸로
2011-03-17
righeira carnegie
2011-03-17
Xiaohui Lin
2011-03-17
Mikael Evander
2011-03-18
righeira carnegie
2011-03-22
Tsoll Doiiu
2011-03-22
petrulp@gmail.com
2011-03-17
Barbara Cortese
PDMS mold peeling off process
Xiaohui Lin
2011-03-17
Righeira:

 What is the anti-stick layer for SU-8?  On top of patterned SU8?

On Thu, Mar 17, 2011 at 7:35 AM, righeira carnegie 
wrote:

> Did you use the anit-stick layer for SU-8?  even if you would have used and
> still if you have problem, it may be it is because FDTS is not
> uniform.  This lack of homogenity is because of a very bad hydroxylation
> of the surface of the SU-8. You should try rinsing in Sulfuric acid for
> homogenity and try the FDTS again.
>
> It works probably.  just my view. I read it in a paper. email me directly
> for the paper.
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
Mentor Graphics Corporation
MEMS Technology Review
The Branford Group