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MEMSnet Home: MEMS-Talk: Silicon etch
Silicon etch
2011-04-05
Aarthi Lavanya Dhanapaul
2011-04-05
Glenn Silveira
2011-04-07
Aarthi lavanya
2011-04-07
Glenn Silveira
Silicon etch
Aarthi Lavanya Dhanapaul
2011-04-05
I have been trying to remove a 1 micron thick Chromium seed layer using
commercially available chrome etchant. But I find the etching is not uniform,
even though there is agitation as well as heating been done. And my structures
on top of chromium ends up being messy.

Can any one suggest a better alternative or suggestions.

Thanks
Aarthi
reply
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