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MEMSnet Home: MEMS-Talk: Si Etch with KOH
Si Etch with KOH
2011-04-15
Aarthi lavanya
2011-04-15
Kevin Nichols
2011-04-15
Michael Cooke
2011-04-15
Anirban Chakraborty
2011-04-16
Jonathan Abbott
2011-04-18
Aarthi lavanya
2011-04-18
Kevin Nichols
2011-04-18
David Springer
Si Etch with KOH
Aarthi lavanya
2011-04-15
Hi,

I have structures sitting on Si wafer and it is covered with layer of
Su-8. The main idea is to etch away Si and have a Su-8 layer with
structures on it.

I've been trying to etch Si using KOH and always end up with gooey
looking liquid and the Si looking all messed.

Suggestions please ..

Cheers
Aarthi
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