Hi,

You could try XeF2 to etch the Si perhaps

Mike


----Original Message-----
From: Aarthi lavanya [mailto:[email protected]]
Sent: Fri 15/04/2011 07:01
To: [email protected]
Subject: [mems-talk] Si Etch with KOH

Hi,

I have structures sitting on Si wafer and it is covered with layer of
Su-8. The main idea is to etch away Si and have a Su-8 layer with
structures on it.

I've been trying to etch Si using KOH and always end up with gooey
looking liquid and the Si looking all messed.

Suggestions please ..

Cheers
Aarthi